SEC-E40 Series
SSEC-E40 ½Ã¸®Áî´Â °¡°Ý °æÀï·ÂÀÌ ¶Ù¾î³ ¸ðµ¨À̸ç, N2±âÁØ ÃÖ¼Ò 0.2SCCMºÎÅÍ ´ëÀ¯·® 500SLM±îÁö Á¦¾î°¡´É
SEC-E400J Series
Metal SealÀ» Àû¿ëÇÑ ¸ðµ¨·Î °¡°Ý °æÀï·ÂÀÌ ¶Ù¾î³ª¸ç, ºÎ½Ä ¹× µ¶¼º°¡½º¿¡ ÀûÇÕÇÑ ¸ðµ¨ ¿¡·¯¾Ë¶÷±â´É žÀç
FTIR-FG-100 Series
FG-100 series´Â, Áö±¸ ¿Â³È ¹æÁö ¶§¹®¿¡ ¿äûµÇ´Â ¿Â½ÇÈ¿°ú °¡½º, PFCs¸¦ ºñ·ÔÇØ, °¢Á¾¹ÝµµÃ¼·FPD process °¡½ºµîÀÇ ´Ù¾çÇÑ ºÐ¼®À» °¡´ÉÇÏ°Ô ÇÑ FTIR°¡½º ºÐ¼®°èÀÔ´Ï´Ù.
Liquid Mass Flow Meter
¼¼°èÃÖÃÊ ³Ã°¢¹æ¹ýÀ» ÀÌ¿ëÇÑ ¼¾¼ ÀåÂø(Àú¿Â±âȹ°Áú Á¦¾î¿¡ Ź¿ù)¸¶ÀÌÅ©·Î À¯¶ûºÎÅÍ ´ë¿ë·®±îÁö ÄÁÆ®·Ñ °¡´É
MFC Readout Unit(SC-100)
MFC(Mass Flow Controller)¿¡ Power¸¦ °ø±ÞÇÏ°í Flow·®À» DisplayÇÏ¸ç ¾ÈÁ¤µÈ Set Point Voltage(0~5VDC)¸¦ ÁÖ¾î MFC°¡ Á¤È®ÇÏ°Ô ControlµÉ ¼ö ÀÖµµ·Ï ÇÏ´Â ÀåÄ¡ ÀÔ´Ï´Ù.
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